Best of both worlds: Direct write and direct view

Photo of the SEM imaging EBL combo PIONEER Two

SEM imaging meets electron beam lithography

PIONEER Two is the ideal solution for all universities and scientists who require both an Electron Beam Lithography (EBL) system and an analytical Scanning Electron Microscope (SEM) in equal measure. The concept of the PIONEER Two defines a new and unique class of instruments and is the first true EBL/SEM-hybrid available. With features such as

  • cutting-edge integrated thermal-field emission (TFE, Gemini column) technology
  • various detectors (ET-SE, inlens SE, inlens EsB, AsB, EDX ...) for optimum EBL mark registration, SEM imaging and SEM analysis
  • modern highest-precision laser interferometer controlled stage
  • “Write and View” configuration (“on board” sample rotation tilt module)
  • modularity and best price/performance ratio for all research budgets, and
  • compact system architecture with compact footprint,
Photo of teh Laser Interferometer Controlled Stage
PIONEER Two Laser Interferometer Controlled Stage with integrated rotation/tilt for professional EBL and SEM imaging

the PIONEER Two integrates all the highest-performance ingredients for professional EBL and SEM imaging into a single complete turnkey system. Versatility, robustness, and user-friendliness make PIONEER Two suitable for all those not only seeking to “print” and re-inspect their nanostructures, but also wanting to access an analytical tool with capabilities for SEM imaging and chemical or structural analysis in materials or life sciences.


If you have any questions or need more information, just get in touch!


World´s smallest beam size in a professional EBL system, at

1.6 nm

Minimum linewidth

≤ 8 nm

Writing speed 6 MHz, optionally

20 MHz

Much more than an SEM pattern generator combo

PIONEER Two is the affordable next step from a pattern generator upgrade kit toward professional EBL. Compared to a state-of-the-art SEM with a (proprietary or third-party) pattern generator, the PIONEER Two is a complete turnkey EBL system at a very competitive price -integrated, supported, and serviced by a single trusted vendor.

With a modern highest-brightness thermal field emission source, both ultra-high-resolution EBL and SEM performance are delivered in uncompromising quality. A set of available secondary and backscattered electron detectors not only support advanced mark recognition procedures, but also ensure crisp SEM imaging and chemical or structural analysis of samples from mm² size up to 2-inch wafers.

With highest-precision laser interferometer controlled stage technology on board – a must for applications that require stitching – PIONEER Two is unequalled at meeting guaranteed EBL system specifications. By exploiting its dimensional metrology features and large-area SEM imaging functionality, PIONEER Two also supports automated process control and optimization.

Like all other multifunctional Raith EBL systems, PIONEER Two comes with Raith NANOSUITE software. This user-friendly and straightforward option helps inexperienced users to control the complete EBL process immediately, but also supports advanced nanofabrication with an array of sophisticated features for functions including automation, large-area processing, 3D exposures, proximity effect correction, and scripting. NANOSUITE represents true multi-user management software: all users find “their” system as they left it without interference from any other user! To find out more about NANOSUITE software click here.

Photo of three people working in the Raith Service and Support Center


Specifications and system performance parameters are certainly drivers of decision-making where EBL systems are concerned. However, more factors need to be taken into consideration if efficient operation, continous uptime, and subsequent reliable support are to be ensured over the instrument system’s lifetime.

With a worldwide team of professional service engineers, Raith Service ensures you can make the best use of your system. When you decide on a Raith system, all site surveys together with environmental measurements, support with the resulting cleanroom laboratory setup, factory and on-site acceptances, and comprehensive on-site training are always included. Moreover, application support is available free of charge in all global time zones.

Raith service contracts follow a modular scheme and can be configured to match your individual requirements and budget. Visit our Service site or get in touch with us to learn more.


Download PIONEER Two brochure